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Basic Parameters
Au77s
Electricity demand
AC230V 11A 50/60Hz 2.5KW(无轨道加热时功率)
Air pressure requirement
90psi(6bar)
Overall Dimensions
770*1200*1400mm(W*D*H)
Weight
650KG
Certification Standards
CE
Positioning accuracy of XYZ axes
XY: ±30um@3σ Z:±10um@3σ
Repeatability Accuracy of XYZ Axes
XY: ±15um@3σ Z:±5um@3σ
Maximum speed
1000mm/s(XY)
acceleration
1.0g
Drive System
伺服电机
Track load capacity
3KG
Track width adjustment range
50~475mm
Substrate Thickness
0.5~6mm
Communication Protocol
SMEMA
Maximum Dispensing Range (Single Track / Dual Track)
350*475mm/350*210mm(W*D)
Specifications and Parameters